Turnkey & Labor service
LAM/TEL/DNS Series
ServiceWET PROCESS · SINGLE WAFER
Process platforms cover Mainframe, EFEM, chemical delivery systems (CDS) and Local Pump Cart configurations.
Specializing in the wet process domain, we offer comprehensive solutions ranging from spare parts to turnkey options for single wafer process tools.
T34 DS, T21 DS, S312 and CDS.
By Process, By Wafer Thickness, By Process Temperature, By Wafer/Glass Geometric Shape.
Start Product Inquiry GuidelineByproduct Remove, Particle Remove, WET Etching, Unconventinal Clean (CO2 Snow Flake Sublimation, Dry Clean for Particle Remove).
Standard (280 ~ 800 um): Front Side / Back Side; Thick (>800 um): Front Side / Back Side; Thin (50~280 um): Front Side.
Ultra High Temperature (70~120 ℃), Normal & High Temperature (25~70℃).
Round Shape, Square Shape, Rectangle Shape.


Brand abstraction; not DCI equipment, control architecture or monitoring results
CIP performance optimisation and AI modules.
Turnkey & Labor service, site safety support.

LAM/TEL/DNS Series
ServiceClass A and Class C occupational safety and health operations, specified chemical substance operations, and organic solvent operations.
Client-site construction safety supportFor equipment needs, system upgrades and engineering services, contact our team.
Business inquiry