STANDARD CDS
Deliver chemistry to the chamber, stably.
Standard CDS; local chemical supply including mixing and temperature control.
CHEMICAL DELIVERY SYSTEM · FAMILY VIEW
Explore the equipment family
Images present the chemical-delivery equipment family; compare each type using the specifications below.
TYPE S
Standard CDS
Standard CDS ・ Type S
Process pump: Maglev + Bellows ・ Drain pump: Diaphragm ・ Tank volume: 80 L ・ STD/Smart Dosing function ・ Inline heater + HEX
TYPE C
Compact CDS
Type C
Process pump: Maglev + Bellows ・ Drain pump: Diaphragm ・ Tank volume: 50 L ・ Inline heater + HEX
LPC
Local Pump Cart
Local Pump Cart ・ LPC
Local supply, mixing and temperature control
Inlet: 1 or 2 chemicals in barrels or FAC supply ・ Mixing fuction ・ Pre-heating function