SMART UPGRADE & MONITORING · CIP
CIP performance optimisation.
The individual modules of the CIP Performance Optimization programme.
MTCHigh-Precision Chemical Temperature Control
Addresses: Temperature Sensitive Process
WTGWafer Temperature Gradient Management
Addresses: Temperature Sensitive Process
IPCReplace EOS (End Of Support) System with Brand New System
Addresses: IPC / Motion Control Upgrade
SISSignal Integration System
Addresses: Signal integration
Replace original plumbing and chamber parts with compatible chemical resistance material
Addresses: Process Change Material Modify
DEBIn-line bubble removal design
Addresses: Bubble Remove
SBSSuckback system
Addresses: Anti dripping suckback system
Smart Dosing / Mixing system design
Addresses: Complicated Dosing / Mixing
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Cyber-Physical System (CPS) ・ Digital Twin
Cyber-Physical System (CPS) ・ Digital Twin.