Products & Services

PRODUCTS & SOLUTIONS

Equipment, chemical delivery, smart upgrades and services.

Five layers form a single wet-process engineering capability. Enter from the product side, or from the process condition side to reach an inquiry route.

01 · MAINFRAME

WET Process Single Wafer Process Equipment

Mercurious (300 mm) and T21 DS process platforms, plus Standard 1 with 1–4 loadports.

T34 DST21 DSStandard 1

02 · CHEMICAL DELIVERY

Chemical Delivery Systems

Standard CDS ・ Type S; Type C; local chemical supply including mixing and temperature control ・ LPC.

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03 · SMART UPGRADE & MONITORING

Intelligence Upgrade & Monitor System

CIP Performance Optimization, plus Cyber-Physical System (CPS) ・ Digital Twin.

Turnkey & Labor Service (LAM / TEL / DNS Series) and on-site construction safety support.

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