專利技術
專利清單（11 項）
PATENT TITLETYPETERMPUBLICATION
MOTOR MONITORING DEVICEUtility Model10 年M533739
CHUCK APPARATUS FOR WET PROCESSING PLATE-LIKE ARTICLEUtility Model10 年M540380
WET ETCHING DEVICEUtility Model10 年M541638
ANNULAR LIQUID COLLECTING DEVICEInvention20 年1584368
FILTERING APPARATUSUtility Model10 年M542508
WAFER DETECTING DEVICE AND WAFER CLEANING APPARATUSUtility Model10 年M558464
WAFER CLEANING APPARATUSUtility Model10 年M579375
FILTERING APPARATUSUtility Model10 年M586632
FILTERING APPARATUSInvention20 年1687258
WET PROCESSING APPARATUS AND WET PROCESSING METHODInvention20 年1776399
WAFER GRIPPING DEVICEUtility Model10 年M638400